Brooks Instrument GF81 - Manual (Page 55)

B-1
Brooks ® GF40/GF80/GF81 Devices
Installation and Operation Manual
X-TMF-GF40-GF80-Series-MFC-eng
Part Number: 541B161AAG
June, 2013 Appendix B: GF40/GF80GF81 Series
Patents
B GF40/GF80/GF81 Series Patents
The GF40/GF80/GF81 Series may be protected by the following US patents
and their international filings.
Patent/Pub. No. Title
6343617 System and method of operation of a digital mass flow controller
6389364 System and method for a digital mass flow controller
6425281 Pressure insensitive gas control system
6445980 System and method for a variable gain proportional-integral (PI) controller
6539792 Method and apparatus for balancing resistance
6640822 System and method of operation of a digital mass flow controller
6681787 System and method of operation of a digital mass flow controller
6714878 System and method for a digital mass flow controller
6752166 Method and apparatus for providing a determined ratio of process fluids
6826953 Flow sensor
6845659 Variable resistance sensor with common reference leg
6910381
System and method of operation of an embedded system
for a digital capacitance diaphragm gauge
6941965 Method and apparatus for providing a determined ratio of process fluids
6962164 System and method for a mass flow controller
7043374 Flow sensor signal conversion
7073392 Methods and apparatus for pressure compensation in a mass flow controller
7082824 Variable resistance sensor with common reference leg
7113895 System and method for filtering output in mass flow controllers and mass flow meters
7114511 System and method for a mass flow controller
7133785 Valve control system and method
7143774 Method and apparatus for providing a determined ratio of process fluids
7150201 System and method for measuring flow
7216019 Method and system for a mass flow controller with reduced pressure sensitivity
7231931 System and method for a mass flow controller
7243035 System and method for mass flow detection device calibration
7272512 Flow sensor signal conversion
7273063 Methods and apparatus for pressure compensation in a mass flow controller
7287434 System and method for measuring flow
7360551 Method and apparatus for providing a determined ratio of process fluids
7363182 System and method for mass flow detection device calibration
7380564 System and method for a mass flow controller
7409871 Mass flow meter or controller with inclination sensor
7412986 Method and system for flow measurement and validation of a mass flow controller
7424894 Method and apparatus for providing a determined ratio of process fluids
7434477 Methods and apparatus for pressure compensation in a mass flow controller
Table B-1 GF40/GF80/GF81 Series Patents