Brooks – Brooks Instrument GF81 User Manual

Page 20

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1-14

Brooks

®

GF40/GF80/GF81 Devices

Installation and Operation Manual

X-TMF-GF40-GF80-Series-MFC-eng

Part Number: 541B161AAG

June, 2013

Section 1 Introduction

Figure 1-5 Dimensions - GF81 Series, DeviceNet

Model GF81 DeviceNet

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