Brooks Instrument GF81 - Manual (Page 39)

4-1
Brooks ® GF40/GF80/GF81 Devices
Installation and Operation Manual
X-TMF-GF40-GF80-Series-MFC-eng
Part Number: 541B161AAG
June, 2013 Section 4 Maintenance & Troubleshooting
4-1 Overview
No routine maintenance is required on the Brooks GF40/GF80/GF81 Series
devices. If an in-line filter is used, the filtering elements should be
periodically replaced or cleaned. Any precision unit such as a flow
controller requires occasional servicing, especially if it has been operating
for an extended period of time. If reactive gases are being used, it is
recommended that you send the device to a Brooks Service Center for
cleaning and recalibration. Please follow the instructions for removal,
product packaging and product return instructions found in Section 2-
Installation—Return Shipment. All active process instrumentation and
equipment is subject to aging and wear from their environment. This
includes temperature, mechanical stress, component tolerance shift,
contaminant buildup, oxidation, and other influences. The effects are
gradual, but over time the changes can affect the accuracy of even the best
equipment. Therefore, it is recommended to re-zero the device at 6 month
intervals. Refer to Section 2-14 Performance Checks for re-zeroing
instructions.
4-2 Maintenance