Brooks Instrument GF81 - Manual (Page 27)

2-7
Brooks ® GF40/GF80/GF81 Devices
Installation and Operation Manual
X-TMF-GF40-GF80-Series-MFC-eng
Part Number: 541B161AAG
June, 2013 Section 2 Installation
Figure 2-2 GF80 Series Mounted to K1 Series Substrate Blocks
1
3
4
2
Table 2-1 K1 Substrate Torque Data
Connection
GF80 to
Subtstrate
Torque Pattern
Use a square pattern as
shown in Figure 2-3.
Start at 25 inch-pounds and
increase in increments of
10 inch-pounds until proper
value is obtained.
Torque (Inch-Pounds)
K1S K1R2 K1H
45 45 45
Figure 2-3 Mounting Screws Torque Pattern