Bronkhorst IQ+FLOW (from 01-07-2013) - Manual (Page 6)

Bronkhorst High-Tech B.V.
IQ+FLOW 9.17.045 6
1 Scope of this manual
1.1 Introduction
This manual covers the IQ + FLOW ® series mass flow/pressure meters/controllers for gases. Examples of the instrument series are
shown in the pictures below. This manual includes product information, installation instructions, operation, maintenance and
troubleshooting.
1.2 Product description
The IQ + FLOW ® series is one of the smallest mass flow, chip based, instruments of its kind for applications with pressure conditions
up to 10 bar (145 psi) and temperatures between 5 to 50 °C (41 to 122 °F). Due to the use of micro system technology, ultra
compact flow controllers are realised with dimensions of only 20 x 40 x 60 mm. The (IQF) flow controllers are able to measure and
control flow rates of 10 mln/min FS up to 5 ln/min FS. The (IQP) pressure controllers are available in ranges from 0.3 to 150 psi
(0.02 to 10 bar). The IQ
+ FLOW ® series has a modular concept with combinations of 20 mm footprint modules, available as single
instruments, but also as multiple channel arrangements. A very compact manifold (IQM) system can be constructed, with one
multi-channel digital pc-board (per 3 channels) in a single housing. Additional filters, control valves and shut-off valves are available
with the same footprints to meet customer demands. The IQF flow sensor is a fast-response chip sensor, with the main advantage
of fast and reliable control response. This is possible due to the MBC3-based pc-board and the flow sensor, which output signal
very accurately corresponds with the real flow behavior.
Communication with the devices can be either in analog mode or digital over RS232 or RS485. Communication over RS232 is
established with the Propar (FLOW-BUS) protocol. With digital operation over RS485 a bus-system with multiple instruments can be
set up. Modbus RTU/ASCII and FLOW-BUS protocols are supported (some exceptions for multi-channel versions, see section 3).
1.3 References to other applicable documents
Instructions:
IQ + FLOW ® Quick Installation Guide (document nr. 9.17.074)
Operation instructions digital instruments (document nr. 9.17.023)
RS232 interface with FLOW-BUS for digital instruments (document nr. 9.17.027)
Modbus slave interface for digital Mass Flow / Pressure instruments (document nr. 9.17.035)
Technical drawings:
Hook-up diagram IQ + FLOW ® RS232/RS485 + Analog I/O (document nr. 9.16.101)
Hook-up diagram IQ + FLOW ® Manifold (multi-channel) (document nr. 9.16.090)
Dimensional drawing IQF/IQP (document nr. 7.05.870)
Dimensional drawing IQFD/IQPD (document nr. 7.05.871)
Dimensional drawing IQM (document nr. 7.05.760)
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These documents are available on: http://www.bronkhorst.com/en/downloads
or can be applied for at our local sales & service representatives