INFICON TM-400 Thin Film Deposition Monitor - Manual (Page 17)

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TM-350/400 Operating Manual
2.2.11 Dynamic Measurement Update Rate
The Monitor utilizes a dynamic updating scheme where the update rate is
automatically varied from 0.5 to 10 measurement updates/sec depending on the
deposition rate. The update rate will increase for high deposition rates where fast
response is important. Conversely, the update rate will decrease for slow
deposition rates to maximize the measurement resolution.
2.2.12 Automatic Crystal Switching (TM-400 Only)
Allows the use of a dual sensor head so that upon crystal failure the instrument can
switch to a backup sensor to complete the film.
2.3 Specifications
2.3.1 Measurement
Frequency Resolution . . . . . . . . . . . 0.03 Hz @ 6.0 MHz (TM-400)
0.5 Hz @ 6.0 MHz (TM-350)
Mass Resolution. . . . . . . . . . . . . . . . 0.375 ng/cm2 (TM-400)
6.0 ng/cm^2 (TM-350)
Thickness Accuracy . . . . . . . . . . . . . 0.5% + 1 count
Measurement Update Rate . . . . . . . Dynamically adjusted, 0.5 to 10 Hz
Display Update Rate . . . . . . . . . . . . 10 Hz
Sensor Crystal Frequency . . . . . . . . 2.5, 3, 5, 6, 9, 10 MHz
2.3.2 Display
Thickness Display . . . . . . . . . . . . . . Autoranging: 0.000 to ± 999.9 KÅ
Rate Display . . . . . . . . . . . . . . . . . . . Autoranging: 000.0 to ± 999.9 Å/sec
Frequency . . . . . . . . . . . . . . . . . . . . 0,000,000.0 to 9,999,999.9 MHz
2.3.3 Computer Interfaces
RS-232 serial port standard
RS-485 serial port optional
IEEE-488 bus interface optional