INFICON TM-400 Thin Film Deposition Monitor - Manual (Page 29)

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TM-350/400 Operating Manual
Figure 3-4 Output Connector
Table 3-1 Output Connector Pin Assignments
Pin Number Signal
1 Sensor Shutter, Normally Closed
2 Source Shutter, Normally Closed
3 Sensor Shutter, Normally Open
4 Source Shutter, Normally Open
5 Not Connected
6 Sensor Shutter, Common
7 Source Shutter, Common
8 GND