INFICON TM-400 Thin Film Deposition Monitor User Manual
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TM-350/400 Operating Manual
3. Send film parameters (Code #2)
Instructs the monitor to send the parameters for film # n to the host computer. A
description of the film parameter list is in
.
Format: Header, Address, Instruction=2, Length=1, Film#(1-100), Checksum.
Example: To instruct the monitor to send the parameter list for material #15 the
computer would send:
Chr$(255)+Chr$(254)+Chr$(1)+Chr$(2)+Chr$(1)+Chr$(15)+Chr$(237)
4. Receive film parameters (Code #3)
Instructs the monitor to enter all the incoming film parameters for film # n into
memory. The parameters must be in the same order and format as the above film
parameter list.
Format: Header, Address, Instruction=3, Length=13, 1 byte, Film# (1-100), 12
bytes film parameter data, Checksum.
Table 10-5 Film Parameter List
Parameter name
Len
Bytes
Byte
Offset
Decimal Pt.
Position
Range
Units
Film Number
1
0
*
1-99
None
Endpoint Thickness
3
1
*
0 - 999,999
Ang
Primary Sensor #
1
4
*
1 - 2
None
Material Density
2
5
2
80-9999
0.01 gm/cm
3
Acoustic Impedance
2
7
2
50-5999
0.01 gm/cm
2
/sec
Tooling Factor #1
2
9
1
100-4999
0.1%
Tooling Factor #2
2
11
1
100-4999
0.1%
Total 13
bytes
* - Indicates decimal point position is not applicable.