Chapter 3 unpacking and inspection, 1 introduction, 2 bench check-out – INFICON TM-400 Thin Film Deposition Monitor User Manual
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TM-350/400 Operating Manual
Chapter 3
Unpacking and Inspection
3.1 Introduction
Carefully inspect your Monitor and its shipping container for evidence of possible
shipping damage or loss. If such evidence is present, a report should be filed with
the carrier as soon as possible. Keep the shipping container as evidence if shipping
damage is present or for possible future return of the instrument. Check the
material received against the packing list to be certain that all material is accounted
for. The following items are included with your Monitor:
1 TM-350/400 instrument
1 Operator's Manual
1 Power cord
1 Output cable (8 pin mini-din, 10’)
1 Input cable, (6 pin mini-din, 10’) optional
1 DAC interface/control unit, optional
3.2 Bench Check-Out
If there is no evidence of damage, the Monitor can now be bench checked. Make
sure that the input power voltage requirement is correct for your installation. If not,
see
to set your Monitor for the correct line voltage.
When power is first applied to the Monitor, all LED displays will light for about two
seconds. This is followed by an "E FAIL" message indicating that the EPROM is
being tested followed by an "I FAIL" message indicating that the RAM is being
tested. The monitor will halt with the failure displayed if a fault is detected and will
remain inoperative until the fault is corrected. Further details of error messages can
be found in
.
Assuming both tests pass, the "P FAIL" message will begin flashing indicating that
power was interrupted for more than 250 ms. Pressing the Stop key will clear the
"P FAIL" message. If a working sensor is not connected to the monitor, a flashing
"O FAIL" will be displayed indicating that the sensor is failed. If an oscillator,
feedthrough, and sensor head are available, you may wish to bench check the total
system at this time. Obviously good vacuum practice should be observed when
handling those items that will later be installed in the vacuum system. Be careful
not to touch the surface of the sensor crystal installed in the Crystal Holder.
Connect the various components as follows. Use the 10' coaxial cable to connect
the Monitor to the "Output" end of the Oscillator. Use the 6" coaxial cable to connect