INFICON TM-400 Thin Film Deposition Monitor User Manual
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TM-350/400 Operating Manual
7. Automatic Data Logging of Binary Values (Code #6)
This instruction allows the computer to setup the TM-350/400 to automatically
output selected binary values to the communication port every 100 milliseconds.
The only benefit in this command over command #5 is that the binary values are at
the maximum resolution of the instrument where the string values are not.
The values sent are determined by the bit value of the message byte in the data
logging instruction message. See
.
All values are sent in Binary format with the most significant byte first. To convert
this to decimal, use the following formula:
Decimal Value = Sum of Byte[n]*256^(Y-1) where n goes from 1 to Y and Y is the
total number of bytes that make up the value.
For example, say you receive the four following bytes representing the mass per
unit area: 0,10,250,76
This equals (0*256^3 + 10*256^2 + 250*256 + 76)*0.137 ng/cm^2 = 98,562.7
ng/cm^2
The rate and thickness values are in the normal units of Ang and Ang/sec. Sensor
period however, is in special units. Use the following formula to convert period to
frequency.
Frequency (Hz) = (3.221E15)/Period
Table 10-8 Automatic Data Logging of Binary Values
Byte #
Bit # Description
Length
(bytes)
Format
Units
1
0
Active Sensor Rate
3
Binary
Å/sec
1
Active Sensor Thickness
3
Binary
Å
2
Active Sensor Period
4
Binary
***
3 Sensor
#1
Rate
3
Binary
Å/sec
4 Sensor
#1
Thickness
3
Binary
Å
5 Sensor
#1
Period
4
Binary
***
6 Sensor
#2
Rate
3
Binary
Å/sec
7 Sensor
#2
Thickness
3
Binary
Å
2 0
Sensor
#2
Period
4 Binary ***
1
Active Sensor #
1
String
None
2
Sensor #1 Mass per unit area
4
Binary 0.137 ng/cm^2
3
Sensor #2 Mass per unit area
4
Binary 0.137 ng/cm^2