INFICON TM-400 Thin Film Deposition Monitor User Manual
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TM-350/400 Operating Manual
5. Send monitor status (Code #4)
Instructs the monitor to send the status data. The description of the status data is
given in
.
Example: To instruct the monitor to send the status data the computer would send:
Chr$(255)+Chr$(254)+Chr$(1)+Chr$(4)+Chr$(0)+Chr$(251)
Table 10-6 Status Data
Parameter Name
Length (bytes)
Range
Active Film #
1
(1-100)
Active Sensor #
1
(1-2)
Sensor #1 Health
1
(0-99 or 255=Failed)
Sensor #2 Health
1
(0-99 or 255=Failed)
Source & Sensor Shutter
1
(Bit6 = Source, Bit7 =
Sensor.
0=Closed,1=Open)
Display #
1
(0=Rate&Thk, 1=Freq,
2=Test)
I/O Address
1
(0-31)
Crystal Type
1
(0=2.5MHz, 1=3.0MHz,
2=5.0MHz, 3=6.0MHz,
4=9.0MHz, 5=10.0MHz)
Simulate Mode
1
(Bit 4, 0=Off, 1=On)
Failure Register
1
Bit0 = Ram Fail Bit1 =
EPROM Fail Bit2 = Film
Data Fail Bit3 = Sensor
Input Fail Bit4 = Not Used
Bit5 = Power Fail Bit6 =
Sensor Card Fail
Total 10 bytes