INFICON TM-400 Thin Film Deposition Monitor - Manual (Page 24)

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TM-350/400 Operating Manual
the "Input" end of the Oscillator to the atmosphere side of the Feedthrough. Use
the 30" miniature coaxial cable to connect the vacuum side of the Feedthrough to
the Sensor Head.
After all the components have been connected, press the STOP button to clear the
"O FAIL" message.
Depressing the START button will set the thickness display to zero. Breathe lightly
on the sensor crystal surface. The displayed thickness should increase due to
condensed water vapor on the crystal. The "O FAIL" message may be reactivated
if excessive water on the crystal causes it to fail. Pressing the Stop key after
sufficient water has evaporated from the surface of the crystal should clear the
failure. The displayed thickness should then decrease as additional water vapor
evaporates from the surface. If operation seems abnormal, check to see that the
stored parameter values are reasonable. The following parameter values are
suggested.
Š Set Point Thickness — 10.00 KÅ
Š Material Density — 2.650 gm/cubic cm
Š Acoustic Impedance — 8.830
Š Tooling Factor — 100.0%
If everything responds as described above the total system is OK. If not, see
Chapter 11, Repair and Maintenance .
3.3 Installing Options
Options are most easily installed while the TM-350/400 is on the bench. Figure 3-9
on page 3-12 shows the location of the various options.
3.3.1 IEEE-488 Option Board
1 Remove the chassis top cover.
2 Locate IEEE-488 option slot and remove the slot cover.
3 Carefully slide the connector of the IEEE-488 board into the slot.
4 Plug the 20-pin ribbon connector into the J7 connector on the Main board, and
then secure the board in place using the screws that came with the board.
5 Replace the chassis top cover and apply power to the monitor.