INFICON TM-400 Thin Film Deposition Monitor User Manual
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TM-350/400 Operating Manual
Table 11-2 Table 10-1 Troubleshooting Aids
Symptom
Possible Cause
Instrument blows line fuse.
a) Line voltage selector is not set for the line
voltage being used. Refer to
.
b) Incorrect fuse size.
Front Panel display never illuminates.
a) Blown fuse.
b) Faulty clock generator TM-400 only (High
Speed Counter board)
“O FAIL” message can't be cleared.
a) Active sensor number not equal to sensor
connected to the "good" sensor. TM-400
only
b) Defective cable or cables. Refer to
.
c) Defective or overloaded sensor crystal.
Refer to
.
d) Oscillator unit connected in the wrong
direction.
e) Bad Oscillator unit.
f) Thickness Monitor not properly grounded
to the vacuum system.
g) Wrong crystal selection, J5. Refer to
Front panel control keys non-functional.
a) Defective keys
b) Bad Front Panel Logic board
Reoccurring C-Fail message on power up. a) “Power up” or “Power down” sequencing
circuit malfunctioning.
b) “RAM Power” switching circuit not
functioning.
c) Aged or defective battery.
Unable to remotely control the instrument via
Input connector.
a) Improperly wired cable/connector.
b) Inputs not properly grounded.
Faulty DAC outputs.
a) Improper DAC wiring.
b) External recording device puts excessive
load on the DAC.