INFICON TM-400 Thin Film Deposition Monitor - Manual (Page 49)

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TM-350/400 Operating Manual
Chapter 7
Operation
7.1 Front Panel Displays
The TM-350 display consists of a 4 digit Thickness display, a 4 digit Rate display,
a Source Shutter LED, a Frequency LED, a Test LED, and a Sensor status LED.
The TM-400 also has a Sensor Shutter LED and a second Sensor Status LED.
When the Source Shutter LED is on, the Source Shutter relay is activated.
The tricolor Sensor Status LED is Green when the sensor is good and is the active
sensor, yellow when the sensor is good and is the inactive sensor (on the TM-400
only), and red when the sensor is failed.
When the Sensor Shutter LED is on, the Sensor Shutter relay is activated.
The rate and thickness displays can display rate and thickness, active sensor
frequency or sensor 1&2 test values. The FREQ and TEST LED’s indicate what
values are being displayed and the Display key increments to the next display
value. If the FREQ and the TEST LED’s are both off, the Rate and Thickness
displays show Rate and Thickness, respectively. If the FREQ LED is on, the rate
display shows the frequency of the active sensor in MHz and the thickness display
shows the remaining digits of frequency in hertz. If the Test LED is on, the first digit
of the Rate display shows the current frequency setting (2=2.5, 3=3.0, 5-5.0, 6=6.0,
9=9.0 or 1=10.0 MHz). The next digit is a dash [-] where a blinking dash indicates
the active sensor. For the TEST display, the last two digits of the rate shows the
crystal health for Sensor 1. The TM-400, will show the same information for Sensor
2 in the Thickness display.
7.2 Front Panel Controls
The front panel controls are made up of fourteen keys, which are arranged in three
groups. The first group of six keys, on the left side of the front panel, are the
operating keys. In this group you will find the Start, Stop, Shutter, Display, Film
Number and Sensor Swap (TM-400 only) keys. The second group of two keys in
the center of the front panel are the Modify up and Modify down keys which are
used to change parameter values and the active film number. The third group of six
keys on the right side of the front panel are the parameter keys. These keys are
used for the display and modification of parameters which is described in
section
7.3 on page 7-2 .
The following describes the function of the operating keys: