4 program parameters, 5 input capability, 6 output capability – INFICON TM-400 Thin Film Deposition Monitor User Manual

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TM-350/400 Operating Manual

2.3.4 Program Parameters

Film Number. . . . . . . . . . . . . . . . . . . 100 Programmable films

Thickness Endpoint . . . . . . . . . . . . . 0.000 to 999.9 KÅ

Density . . . . . . . . . . . . . . . . . . . . . . . 0.1 to 99.99 gm/cm

3

Acoustic Impedance. . . . . . . . . . . . . 0.50 to 59.99 × 10

-5

gm/cm

2

/sec

Tooling Factor #1 . . . . . . . . . . . . . . . 10.0 to 999.9%

Tooling Factor #2 (TM-400 only) . . . 10.0 to 999.9%

Primary Sensor (TM-400 only) . . . . . 1 to 2

2.3.5 Input Capability

Discrete Inputs . . . . . . . . . . . . . . . . . TTL level inputs activated by a short across

the input pins (min 200 ms pulse): Start, Stop,
Film Number, Increase, Decrease

2.3.6 Output Capability

Source Shutter Relay . . . . . . . . . . . . One Single Pole Single Throw Relay,

120 VA, 2A Max

Sensor Shutter Relay . . . . . . . . . . . . (TM-400 only.) One Single Pole Single Throw

Relay, 120 VA, 2A Max

Digital to Analog Converter . . . . . . . Rate and Thickness; 0 to 5 V(dc), 11 bit

resolution, 2 or 3 Decade range

2.3.7 Other

Input Power Requirements. . . . . . . . 100, 120, 200, 240 V(ac); 50/60 Hz; 25 watts

Fuse Rating . . . . . . . . . . . . . . . . . . . IEC T-Type (Slow), 4/10 A, 250 V(ac)

Operating Temperature Range. . . . . 0 to 50°C

Physical Size

. . . . . . . . . . . . . . . . . . . . Instrument Case 3.47” H × 8.4” W × 9.7”D

19” Rack-mount case 3.47” H × 19” W × 9.7” D

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