Thickness monitor – INFICON TM-400 Thin Film Deposition Monitor User Manual
Page 3
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O P E R A T I O N A N D S E R V I C E M A N U A L
TM-350/400
Thickness Monitor
178800 Rev. B
www.inficon.com [email protected]
Due to our continuing program of product improvements, specifications are subject to change without notice.
©2007 INFICON
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