INFICON TM-400 Thin Film Deposition Monitor - Manual (Page 58)

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TM-350/400 Operating Manual
8.4 Rate Calculation
The deposition rate is calculated by dividing the change in thickness between
measurements by the time between measurements. The rate is then filtered by a
three pole digital filter to filter out quantizing and sampling noise introduced by the
discrete time, digital nature of the measurement process. The above filter has an
effective time constant of about 2 seconds. Following a step the displayed rate will
settle to 95% of the final value in 5 sec.