INFICON TM-400 Thin Film Deposition Monitor - Manual (Page 78)

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TM-350/400 Operating Manual
11.3 Self Test Failure Detection
The Monitor's self test features detect several system failures. The specific failures
are described below. Upon detection of a failure the appropriate message is
displayed. There are basically two types of system failures: failures that may not be
reset by the operator and those that may. You cannot reset the E FAIL or I FAIL
messages. They may be cleared only by the replacement of the defective
components. These failures are displayed continuously and ALL OTHER SYSTEM
OPERATIONS ARE DISABLED. For these internal failures, it is recommended that
the instrument be returned to the factory for repair. On failures that may be reset,
the front panel display alternates the particular failure message and the Rate and
Thickness values prior to the failure. The display continues to alternate the failure
until the fault has been reset.
The following is a summary of detected failures, the displayed messages and the
necessary actions to reset them.
Any long-term failures can cause serious thickness errors if they occur during a
run. To save any materials, which may be in process, the shutter is automatically
closed. The process can be continued only after the fault has been corrected and
the message has been reset as described above. If there is more than one failure,
the other failure will then be displayed. When no failures exist, only current display
values will be displayed. A description of the conditions of the individual failures
follows.
11.3.1 EPROM Failure (E FAIL)
In the case of a failure in the TM-350/400's program memory or EPROM, the
E FAIL message is displayed. If an EPROM failure occurs, the monitor should be
returned for repair.
Table 11-1 Detected Failures
Detected Failure Failure Message Reset by:
EPROM Failure E FAIL Replacement of defective ROM
RAM Failure I FAIL Replacement of defective RAM
Film Data Failure C FAIL Press STOP button
Power Failure P FAIL Press STOP button
Oscillator Failure O FAIL Press STOP button
Sensor Card Failure S FAIL Replacement of sensor measurement card