2 ram failure (i fail), 3 film data failure (c-fail), 4 power failure (p-fail) – INFICON TM-400 Thin Film Deposition Monitor User Manual

Page 79: 5 oscillator failure (o-fail), 6 sensor card failure (s fail)

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2 ram failure (i fail), 3 film data failure (c-fail), 4 power failure (p-fail) | 5 oscillator failure (o-fail), 6 sensor card failure (s fail) | INFICON TM-400 Thin Film Deposition Monitor User Manual | Page 79 / 82 2 ram failure (i fail), 3 film data failure (c-fail), 4 power failure (p-fail) | 5 oscillator failure (o-fail), 6 sensor card failure (s fail) | INFICON TM-400 Thin Film Deposition Monitor User Manual | Page 79 / 82
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