3pxx-0xx-xx2x, Validity trademark – INFICON PSG55x ATM to Medium Vacuum Gauge (Profibus) User Manual

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This document applies to products of the Pirani Capacitance Diaphragm (PCG550,
PCG552, PCG554) and Pirani Standard Gauges (PSG550, PSG552, PSG554) with
Profibus interface.

Part numbers of standard products are indicated below. OEM products have other
part numbers and different parameter settings (e.g. factory setting of setpoint) as
defined in the corresponding ordering information.

3Pxx-0xx-xx2x

Measuring signal

Receptacle

*) Solid state relay
**) Electromechanical relay

Flange

Filament

1

⇒ DN 16 ISO-KF

2

⇒ DN 16 ISO-KF long tube

4

⇒ DN 16 CF-F

5

⇒ DN 16 CF-R long tube

6

⇒ DN 25 ISO-KF

D

⇒ 4 VCR female

E

⇒ 8 VCR female

F

⇒ 1/8" NPT

K

⇒ Flange 29×29 mm

M ⇒ 4 VCR female 90°
N

⇒ 7/16-20 UNF male

0

⇒ mbar

1

⇒ Torr

2 ⇒ Pa

3

⇒ micron

1

Tungsten

2

Nickel

3

⇒ Ceramic coated

6

⇒ Tungsten, galvanically isolated

7 ⇒

Nickel, galvanically isolated

8

⇒ Ceramic coated, galvanically isolated

Unit

0

⇒ None

1

⇒ Display

2

⇒ 2 switching functions *)

3

⇒ ATM sensor &

2 switching functions *)

4

⇒ Display & 2 switching functions *)

5

⇒ Display & ATM sensor &

2 switching functions *)

6

⇒ 2 switching functions **)

0

⇒ FCC

1

⇒ D-Sub, 9-pin

2

⇒ D-Sub, 15-pin HD

4

D-Sub, 15-pin HD, RS485 INF

5

⇒ Hirschmann, Type GO 6

0

0.61 ... 10.23 V

1

⇒ 1.2 ... 8.68 V

2 ⇒ 0.375 ... 5.659 V
3

⇒ 1.57 ... 9.05 V

Product family C

Pirani Capacitance Diaphragm Gauge

I

Pirani Standard Gauge

Display Switching function


The part number (PN) can be taken from the product nameplate.

If not indicated otherwise in the legends, the illustrations in this document
correspond to PCG550 gauges with the DN 16 ISO-KF vacuum connection. They
apply to other vacuum connections and to the other gauges by analogy.

We reserve the right to make technical changes without prior notice.

SEMI

®

Semiconductor Equipment and Materials International, California


Validity

Trademark

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