INFICON Stripe CDG045Dhs 0.01 ... 1000Torr / mbar, new 10mTorr - Manual (Page 10)

10 tina84e1 (2014-07)
2 Technical Data
Measurement range → "Validity"
Precision
1)
0.01 … 0.05 F.S.
0.2% of reading
Accuracy 2)
0.1 … 1100 F.S.
0.15% of reading
Temperature effect on zero
0.01 … 0.02 F.S.
0.05 … 0.5 F.S.
1 … 1100 F.S.
0.0100% F.S./ °C
0.0050% F.S./ °C
0.0025% F.S./ °C
Temperature effect on span 0.01% of reading / °C
Resolution 0.003% F.S.
Gas type dependence none
Output signal analog
(measurement signal)
Measurement range 0 … +10 V
Voltage range –5 … +10.5 V
(limited to +10.5 V)
Relationship voltage-pressure linear
Output impedance 0 Ω (short-circuit proof)
Loaded impedance >10 k Ω
Step response time 3)
Analog output signal
Digital output signal (EtherCAT
interface)
≤1 ms
≤2 ms
Identification
Resistance R
Ident
Voltage
13.2 k
Ω referenced to sup-
ply common
≤5 V
1)
→ ISO/WD 15725-1
2)
Non-linearity, hysteresis, repeatability at 25 °C ambient operating
temperature without temperature effects after operation of 2 h.
3 )
Increase 10 … 90 % F.S.R.