INFICON Stripe CDG045Dhs 0.01 ... 1000Torr / mbar, new 10mTorr User Manual
Page 6
6
tina84e1 (2014-07)
Contents
Product Identification
2
Validity 3
Intended Use
4
Functional Principle
4
Trademarks 4
Patents 5
Scope of Delivery
5
1
Safety 8
1.1
Symbols Used
8
1.2
Personnel Qualifications
8
1.3
General Safety Instructions
9
1.4
Liability and Warranty
9
2
Technical Data
10
3
Installation 16
3.1
Vacuum Connection
16
3.2
Power Connection
19
3.2.1
D-Sub, 15-pin Connector
20
3.2.2
EtherCAT Connector
21
3.2.3
Mini USB Type B Connector (Diagnostic Port)
22
4
Operation 23
4.1
Status Indication
23
4.2
Zeroing the Gauge
24
4.2.1
<ZERO> Adjustment
24
4.3
Switching Functions SP1, SP2
28
4.4
Error Status
32
4.5
ATM Setpoint
33
4.6
Activating the Factory Setting (Factory Reset)
34
4.7
Diagnostic Port (USB Interface)
35
4.8
EtherCAT Operation
36
5
Deinstallation 37
6
Maintenance, Repair
39