INFICON Stripe CDG045Dhs 0.01 ... 1000Torr / mbar, new 10mTorr - Manual (Page 41)

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Further Information
 [1] www.inficon.com
Operating Manual
Single-Channel Controller VGC401
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INFICON AG, LI–9496 Balzers, Liechtenstein
 [2] www.inficon.com
Operating Manual
Two- & Three-Channel Measurement and Control Unit
VGC402, VGC403
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INFICON AG, LI–9496 Balzers, Liechtenstein
 [3] www.inficon.com
Communication Protocol
EtherCAT CDGxxxDxx
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INFICON AG, LI–9496 Balzers, Liechtenstein
 [4] www.inficon.com
Kommunikationsanleitung
Diagnostic Port via T-Gauge
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INFICON AG, LI–9496 Balzers, Liechtenstein
 [5] ETG.5003.1: Semiconductor Device profile – Part 1:
Common Device Profile (CDP)
 [6] ETG.5003.2080: Semiconductor Device profile – Part
2080: Specific Device Profile (SDP): Vacuum Pressure
Gauge