Intended use, Functional principle, Trademarks – INFICON Stripe CDG045Dhs 0.01 ... 1000Torr / mbar, new 10mTorr User Manual

Page 4

Advertising
background image

4

tina84e1 (2014-07)

If not indicated otherwise in the legends, the illustrations in this
document correspond to gauges with DN 16 ISO-KF vacuum
connection. They apply to gauges with other vacuum connec-
tions by analogy.
We reserve the right to make technical changes without prior
notice.

Intended

Use

The temperature compensated Capacitance Diaphragm Gauges
of the Stripe CDG045Dhs series are intended for absolute
pressure measurement of gases in their respective pressure
ranges (

→  3).

Ideally the measurement values can be read out digitally via
EtherCAT interface or analog. The gauges can also be operated
in connection with an INFICON Vacuum Gauge Controller (VGC
series) or another appropriate controller.

Functional

Principle

A ceramic diaphragm is deflected by pressure. The deflection is
measured capacitively and converted into a digital or into an
analog linear output signal by the digital electronics. The digital
output signal can only be read out via the EthreCAT interface.
The output signal is independent of the gas type.
Very accurate pressure measurement is achieved by heating the
sensor to a constant temperature of 45°C which results in a com-
pensation of changes in the ambient conditions and a reduced
deposition of process products and by-products in process appli-
cations.

Trademarks

SKY

®

INFICON

GmbH

VCR

®

Swagelok Marketing Co.


Advertising