INFICON Sputtering Sensor Instruction Manuals and User Guides
We have 1 Instruction Manual and User Guide for Sputtering Sensor INFICON
Manuals
| Recognized languages: | English |
|---|---|
| Pages: | 54 |
| Size: | 3.13 MB |
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Document Outline
- Cover Page
- Title Page
- Trademarks
- Registration Card
- Warranty
- Contact List
- Table Of Contents
- Chapter 1 Sensor Specifications
- Chapter 2 Sensor Installation
- 2.1 Introduction
- 2.2 Pre-installation Sensor Check
- 2.2.1 IC/5 Deposition Controller
- 2.2.2 Applies to Sensor Installation with an IC-6000 or XTC Deposition Controller
- 2.2.3 Applies to Sensor Installation with an IC/4 or IC/4 PLUS Deposition Controller
- 2.2.4 Applies to Sensor Installation with an XTC/2 or XTC/C Deposition Controller, or XTM/2 Depos...
- 2.3 General Guidelines
- 2.4 Installing the Sputtering Sensor
- 2.5 Sensor Shutter Function Check
- 2.6 Sputtering Sensor Shutter Module Installation Instructions
- Chapter 3 Installation of the Solenoid Valve Assembly
- Chapter 4 Maintenance
- Chapter 5 Feedthrough Outline Drawings