INFICON Sputtering Sensor - Manual (Page 37)

3 - 1
IP
N 07
4-
15
7L
Sputtering Crystal Sensor Operating Manual
Chapter 3
Installation of the Solenoid Valve Assembly
3.1 Introduction
The solenoid valve assembly and the feedthrough should be installed at the same
time. The same valve assembly is used for both the 1" and the (recommended) 2
3/4" feedthroughs. However, if the assembly is to be used with the 2 3/4"
feedthrough, you will need to modify the valve bracket as follows. See
Figure 5-6
on page 5-7 .
1 Align the score line on the valve assembly bracket over the edge of a table or
other square edge.
2 Using pliers, grasp the part of the bracket extending over the edge and push
down. The assembly will break along the score line. Use a file to smooth any
rough edges which occur along the break.
3.2 Installation with 1" Bolts
If you are installing the solenoid valve assembly for utilization with a dual sensor,
you will need two 1" bolts. (IPN 002-042 — see
Figure 5-1 on page 5-2 .) Use the
first as is; on the second, one water tube must be plugged, the other must have a
fitting adapter (IPN 007-133) soldered to it. (This part is only available from
INFICON.)
If you are installing the solenoid valve assembly for utilization with any other
sensor, you will need only one 1" bolt feedthrough (IPN 750-030-G1, see
Figure
5-2 on page 5-3 .)
Follow the steps below:
1 Ensure that the o-ring is in place on the bolt. Insert the 1" bolt such that the
hexagonal shaped end of the bolt is on the vacuum side of the chamber.
2 Add the Bracket.
3 Add the Washer.
4 Add the Nut.
5 Tighten the feedthrough nut.
6 Install the air fitting to the tube which has the female thread adapter installed.
7 Connect the 1/8" air tube from the valve to the just installed fitting.