INFICON Sputtering Sensor - Manual (Page 13)

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IP
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15
7L
Sputtering Crystal Sensor Operating Manual
Chapter 1
Sensor Specifications
1.1 Specifications for the
Sputtering Crystal Sensor
Figure 1-1 Sputtering Crystal Sensor (IPN 750-618-G1)
Maximum bakeout temp
with no water: . . . . . . . . . . . . . . . . . . 105 °C
Size (maximum envelope):. . . . . . . . 1.36" OD x 0.69" high (3.45 cm x 1.75 cm)
Water, air and coax length:. . . . . . . . Standard 30" (76.2 cm)
Crystal exchange:. . . . . . . . . . . . . . . Rear-loading
Mounting: . . . . . . . . . . . . . . . . . . . . . Customer supplied
1.1.1 Installation Requirements
Feedthrough . . . . . . . . . . . . . . . . . . . 2 pass water with coax connector
2-3/4" ConFlat® Flange - IPN 002-043
1" Bolt - IPN 002-42
Other . . . . . . . . . . . . . . . . . . . . . . . . 1. Customer to provide vacuum-tight braze
joints or connectors for the water tubes.
2. XIU or Oscillator designed to interface with
the specific deposition controller.
Water Flow Rate. . . . . . . . . . . . . . . . Minimum water flow 750 cc/min, 30 °C max
Coolant should not contain chlorides as
stress corrosion cracking may occur. If the
water tube passes through a cryoshroud,
drain the tubes if the water flow is stopped for
any reason.
CAUTION
Do not allow water tubes to freeze. This may happen if the
tubes pass through a cryogenic shroud and the fluid’s
flow is interrupted.