3 installation with 2 3/4" feedthrough – INFICON Sputtering Sensor User Manual
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IP
N 07
4-
15
7L
Sputtering Crystal Sensor Operating Manual
CAUTION
Applicable to sensor 750-446 only: Use of more than 80"
(2 meters) of 1/8" tubing between the valve and the
bellows may cause switcher failure because of the time
required to bleed out sufficient air during
de-pressurization. If tubing greater than 1/8" is used, the
maximum length must be reduced proportional to the
additional volume.
8
Attach the valve’s intake (normally closed (NC) port) to the 80-90 PSIG (5.5-6.2
bar) [550-620 kPa] source of air. Or, 90-95 PSIG (6.2-6.55 bar) [620-655 kPa]
air supply for the Sputtering Shutter (IPN 750-005).
3.3 Installation with 2 3/4" Feedthrough
If you are installing the solenoid valve assembly with a dual sensor, a
2 3/4" feedthrough inclusive of two coaxial feedthroughs (IPN 002-080, see
) is required. All other shuttered sensors utilizing 2 3/4"
feedthroughs require only a single coaxial feedthrough. The second coaxial
feedthrough is not used, and should be protected from damage as a result of
process material. Follow the steps below:
1
Install the Feedthrough.
2
Add the valve bracket (modified) to the desired location utilizing two of the
flange’s 1/4" clamp bolts.
3
Tighten the flange bolts.
4
Install the air fitting to the female thread adapter.
5
Connect the 1/8" air tube from the valve outlet to the feedthrough fitting. See
the caution at the top of this page.
6
Attach the valve’s intake (normally closed (NC) port) to the 80-90 PSIG (5.5-6.2
bar) [550-620 kPa] source of air. Or, 90-95 PSIG (6.2-6.55 bar) [620-655 kPa]
air supply for the Sputtering Shutter (IPN 750-005).
NOTE: Maximum temperature for the shutter control valve assembly is 105 °C for
bakeout and operation.