INFICON Sputtering Sensor - Manual (Page 48)

5 - 2
IP
N 07
4-
15
7L
Sputtering Crystal Sensor Operating Manual
Figure 5-1 1" Crystal Feedthrough (002-042)
0.75
1" WASHER
MICRODOT CONNECTOR
HEX NUT
BNC CONN.
SEAMLESS TUBE
0.188 O.D., 0.131 I.D.
0.75
5.00
2.00
5.00
1.50
0.2
0.4
0.156
0.2