INFICON Sputtering Sensor - Manual (Page 20)

1 - 8
IP
N 07
4-
15
7L
Sputtering Crystal Sensor Operating Manual
1.3 Specifications for the Shutter Assembly
Figure 1-4 Pneumatic Shutter Module (750-005-G1) with Sputtering Sensor
Temperature: . . . . . . . . . . . . . . . . . . 130 °C
Materials: . . . . . . . . . . . . . . . . . . . . . 300 series stainless steel
Pressure: . . . . . . . . . . . . . . . . . . . . . 90-95 PSIG (6.2-6.55 bar) [620-655 kPa]
operation 110 PSIG (7.6 bar) [760 kPa]
maximum
Shutter:. . . . . . . . . . . . . . . . . . . . . . . Pneumatically operated
Braze:. . . . . . . . . . . . . . . . . . . . . . . . Vacuum process high temperature
Ni-Cr Alloy