INFICON Sputtering Sensor User Manual
Page 30
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Sputtering Crystal Sensor Operating Manual
3
The sensor contains a permanent magnet, see
. If the sensor is to
be installed in a sputtering system which employs external magnetic fields,
make sure the magnetic field direction of the sensor is not opposing the
external magnetic field, see
.
Figure 2-4 Sensor Magnet and Field Configuration
Magnetic
Field Direction
Side
View
Magnetic
Field
Direction
Magnet can be rotated
inside the cover.
To secure the magnet, insert a
thin piece of non-ferrous metal
wire or sheet into the gap between
the circumference of the magnet
and its opposing wall.
View
From
Inside
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