INFICON Sputtering Sensor - Manual (Page 42)

4 - 2
IP
N 07
4-
15
7L
Sputtering Crystal Sensor Operating Manual
4.1.4 Crystal Concerns when Opening the Chamber
Thick deposits of some materials, such as SiO, Si and Ni will normally peel off the
crystal when it is exposed to air, due to changes in film stress caused by gas
absorption. When peeling material is observed, replace the crystal.
4.1.5 Care of the Ceramic Retainer
CAUTION
Do not use excessive force when handling the Ceramic
Retainer Assembly since breakage may occur. Always
use the crystal snatcher.
To prevent scratching the crystal electrode, do not rotate
the ceramic retainer after installation.
Always use clean nylon lab gloves and plastic tweezers
for handling the crystal. This avoids contamination which
may lead to poor adhesion of deposited material to the
electrode.
4.1.6 Leaf Spring Concerns
Spring conditions should be observed as part of the routine maintenance interval.
Insufficient bends or deformities in the spring contacts in the sensor body are
common causes of crystal problems. Lift each leaf spring up approximately 60°.
Figure 4-1 Shaping the Leaf Spring
60°
Leaf
Spring
Avoid kinking
leaf spring