INFICON Sputtering Sensor - Manual (Page 35)

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Sputtering Crystal Sensor Operating Manual
Figure 2-8 Bottom View
4 Place the sensor cover on the shutter module assembly as shown in Figure
2-8 . The sensor water lines will fit between the shutter pivot and the stop screw.
Carefully bend the water lines as shown.
5 Position the water line clamp on the shutter assembly and install the two
mounting screws. Tighten the screws finger tight.
6 Position the sensor cover as shown in Figure 2-6 . The shutter should cover the
sensor cover as shown. It may be necessary to align the sensor slightly to
achieve correct positioning.
7 The plane of the shutter and sensor cover should be parallel as shown in
Figure 2-7 . Again, it may be necessary to align the sensor slightly to achieve
correct positioning.
8 Tighten the two water tube clamp screws.
9 Manually rotate the shutter away from the sensor cover as shown in Figure 2-6
and then let it go; the return operation should be smooth and unobstructed.
10 Install the actuator cover on the shutter actuator assembly and install the
actuator cover screw (4-40 x 3/16). (Refer to
Figure 2-6 .)
11 Install the sensor body assembly into the sensor cover. The assembly will now
appear as shown in
Figure 2-7 .
Stop Screw
Shutter Pivot
Actuator
Mounting Bracket
Water Tube Clamp Stop Screw