INFICON Sputtering Sensor - Manual (Page 31)

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Sputtering Crystal Sensor Operating Manual
Figure 2-5 Orientation of Sensor Magnetic Field in a Sputtering System
Employing External Magnetic Field
The cancellation of magnetic fields near the sensing crystal may cause
undesirable heating of the crystal. Use a small magnet to determine the field
direction and rotate the magnet in the sensor to a desirable position. The
sensor magnet can be held in position by inserting a small piece of thin
non-magnetic wire or sheet into the gap between the circumference of the
magnet and the opposing wall. The sensor’s magnetic field is localized, and will
not affect the external magnetic field to any extent.
4 The sensor is always at ground potential and cannot be made floating. In
sputtering systems where the substrate holder (anode) is biased, the sensor
should be located where it is electrically isolated from the substrate holder and
where it does not affect the electric field near substrates.
5 Be sure both the sensor and the vacuum system are adequately grounded.