INFICON Sputtering Sensor - Manual (Page 27)

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Sputtering Crystal Sensor Operating Manual
2.3.1 Crystal Sensor Installation
Generally, install the sensor as far as possible from the evaporation source (a
minimum of 10" or 254 mm) while still being in a position to accumulate thickness
at a rate proportional to accumulation on the substrate.
Figure 2-2 shows proper
and improper methods of installing sensors.
Figure 2-2 Sensor Installation Guidelines
To guard against spattering, use a source shutter to shield the sensor during the
initial soak periods. If the crystal is hit with a minute particle of molten material, it
may be damaged and stop oscillating. Even in cases when it does not completely
stop oscillating, it may immediately become unstable, or shortly after deposition
begins instability may occur.
Plan the installation to insure that there are no obstructions blocking a direct path
between the sensor and the source.
Install sensors in such a manner that the center axis of the crystal is aimed directly
at the source to be monitored. Verify that the angle of the sensor location (with
reference to the source) is well within the evaporant stream.
Assemble the sensor mounting bracket on the process system. With the bracket in
place, temporarily position and attach the sensor head as outlined in the general
guidelines above. Next, temporarily install the feedthrough. You may now form,
measure, and mark the sensor tubes.
Build the Sensor/Feedthrough Assembly. Remove the sensor and the feedthrough,
cut the water cooling tubes and air tubes to the proper length and connect them
directly to the feedthrough or use vacuum rated couplings.
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