INFICON Sputtering Sensor - Manual (Page 33)

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Sputtering Crystal Sensor Operating Manual
2.6 Sputtering Sensor Shutter Module
Installation Instructions
2.6.1 Introduction
The Sputtering Shutter Module installation kit was designed to facilitate the
mounting of a pneumatic shutter module onto a sputtering sensor. The pneumatic
shutter module is assembled and tested prior to shipment.
To install the pneumatic shutter module, you must have the parts shown
in
Table 2-1 .
Table 2-1 Parts Required to Install the Pneumatic Shutter Module
Qty. Description IPN
1 Pneumatic Shutter Assembly 750-005-G1 (refer to section 1.3 on
page 1-8 )
1 Sputtering Sensor Assembly 750-618-G1 (refer to Chapter 1 )
NOTE: The following parts are listed as suggested equipment and may be
ordered separately.
1 1” Crystal Feedthrough with Airline
(or equivalent) 750-030-G1 (see Figure 5-2 on
page 5-3 )
OR
1 2-3/4” Dual Coaxial Instrumentation
Feedthrough Copper Gasket with
Airline 002-080-G1 (see Figure 5-4 on
page 5-5 )
1 Solenoid Valve Assembly 750-420-G1 (see Chapter 3 )