INFICON Sputtering Sensor - Manual (Page 43)

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Sputtering Crystal Sensor Operating Manual
4.2 Crystal Replacement Instructions
Follow the steps below to replace the crystals: (Refer to Figure 1-3 on page 1-4 ).
Observe the general precautions (refer to section 4.1 on page 4-1 ) for replacing
crystals.
1 Grip the crystal holder with your fingers and pull it straight out to separate it from
the water-cooled front part. (You may have to disconnect the sensor cable in
order to separate the parts.)
2 Pull the crystal holder straight out from the front of the sensor.
3 Insert the tapered end of the crystal snatcher (part number 008-007) into the
ceramic retainer (
Figure 4-2 -A) and apply a small amount of pressure. This
locks the retainer to the snatcher and allows the retainer to be pulled straight
out (
Figure 4-2 -B).
Figure 4-2 Using the Crystal Snatcher
4 Invert the crystal holder and the crystal will drop out.
5 Prior to installing the new crystal, review section 4.1.1, Handle the Crystal
with Care, on page 4-1 .
6 Using clean nylon gloves, grasp the edge of the new crystal with a clean pair of
plastic tweezers. Orient the crystal so the patterned electrode is facing up.
Gently insert the edge of the crystal beneath one of the wire segments that
protrude into the crystal cavity. Release the crystal.
7 Replace the ceramic retainer. Initially orient it at an angle to displace the spring
wire segments in the crystal holder.
8 Release the crystal snatcher with a slight side-to-side rocking motion. Using the
backside of the crystal snatcher, push on the ceramic retainer to ensure it is
completely seated.
9 Put the holder into the front cover of the sensor.
10 Align the position of the back part so that the connector matches with the notch
on the front of the sensor. Snap the two parts together. Reconnect the sensor
cable if it has been disconnected.