INFICON Sputtering Sensor User Manual
Page 24
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IP
N 07
4-
15
7L
Sputtering Crystal Sensor Operating Manual
8
Breathe heavily on the crystal. A thickness indication of 1.000 to 2.000 KÅ
should appear on the display. When the moisture evaporates, the thickness
indication should return to approximately zero.
If the above conditions are observed, you can assume the sensor is in proper
working order and may be installed.
2.2.2 Applies to Sensor Installation with an IC-6000 or XTC Deposition
Controller
1
Connect the in-vacuum sensor head cable to the feedthrough or coax adapter
(Microdot/BNC).
2
Connect one end of the 6" OSC cable (IPN 013-070) to the receptacle on the
feedthrough.
3
Connect the other end of the 6" OSC cable to the receptacle marked XTAL on
the oscillator (IPN 013-001).
4
Connect the end of the oscillator source/sensor cable (IPN 013-067) to the
remaining BNC receptacle on the oscillator.
5
Connect the other end of the OSC source/sensor cable to the receptacle
marked OSC on the rear panel of the controller.
6
Install the crystal as instructed by
7
Connect power to the controller and set the power switch to ON. Set density at
1.00 gm/cc and zero the thickness. The display should indicate 0 or ±0.001KÅ.
Crystal life should read from 0 to 4%.
8
Breathe heavily on the crystal. A thickness indication of 1.000 to 2.000 KÅ
should appear on the display. When the moisture evaporates, the thickness
indication should return to approximately zero.
If the above conditions are observed, you can assume the sensor is in proper
working order and may be installed.
2.2.3 Applies to Sensor Installation with an IC/4 or IC/4 PLUS Deposition
Controller
1
Connect the in-vacuum sensor head cable to the feedthrough or a coax adapter
(microdot/BNC).
2
Connect one end of the 6" XIU cable (IPN 755-257-G6) to the BNC connector
or the feedthrough.
3
Connect the other end of the 6" XIU cable to the connector of the XIU (IPN
755-252-G1).
4
Connect one end of the 15’ long XIU cable (IPN 755-258-G15) to the mating
connector of the XIU.