INFICON Sputtering Sensor - Manual (Page 25)

2 - 3
IP
N 07
4-
15
7L
Sputtering Crystal Sensor Operating Manual
5 Connect the other end of the XIU cable to a sensor channel at the rear of the
controller.
6 Install the crystal as instructed by section 4.2 on page 4-3 .
7 Connect power to the controller and set the power switch to ON. Set density at
1.00 gm/cc, and zero thickness. The display should indicate 0 or ±001. Crystal
life should read from 0 to 3%.
8 Breathe heavily on the crystal. A thickness indication of 1.000 to 2.000 KÅ
should appear on the display. When the moisture evaporates, the thickness
indication should return to approximately zero.
If the above conditions are observed, you can assume the sensor is in proper
working order and may be installed.
2.2.4 Applies to Sensor Installation with an
XTC/2 or XTC/C Deposition Controller, or
XTM/2 Deposition Controller
1 Connect the in-vacuum sensor head cable to the feedthrough or a coax adapter
(microdot/BNC)
2 Connect one end of the 6" XIU cable (IPN 755-257-G6) to the BNC connector
or the feedthrough.
3 Connect the other end of the 6" XIU cable to the connector of the XIU (IPN
575-302-G1).
4 Connect one end of the “XX” long XIU cable (IPN 757-303-GXX) to the mating
connector of the XIU.
5 Connect the other end of the XIU cable to a sensor channel at the rear of the
controller.
6 Install the crystal as instructed by section 4.2 on page 4-3 .
7 Connect power to the controller and set power switch to ON. Set density at 1.00
gm/cc, and zero thickness. The display indicate 0 or ±.001. Crystal life should
read from 0 to 4%.
8 Breathe heavily on the crystal. A thickness indication of 1.000 to 2.000 KÅ
should appear on the display. When the moisture evaporates, the thickness
indication should return to approximately zero.
If the above conditions are observed, you can assume the sensor is in proper
working order and may be installed.