4 electrical and pneumatic connections, 1 electrical, 2 pneumatic – INFICON Sputtering Sensor User Manual
Page 39: Caution
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Sputtering Crystal Sensor Operating Manual
3.4 Electrical and Pneumatic Connections
3.4.1 Electrical
To complete installation of the assembly, make electrical connections where
indicated in
to either 24 V(ac) or V(dc). Current required
is approximately 70 mA.
CAUTION
Maximum applied voltage must not exceed 26 V(ac).
3.4.2 Pneumatic
Figure 3-1 Pneumatic Solenoid Tube Connections
TO AIR
FITTING OF
FEEDTHROUGH
EXHAUST
(Normally Open)
A OUTPUT
PORT
P SUPPLY
(Normally Closed)
80-90 PSIG
AIR SUPPLY
TUBE FITTING
(Provided with Valve)
Figure 3-1a
Solenoid Valve
Without Orifice
(As Supplied)
Figure 3-1b
Solenoid Valve
With Orifice
(Installed by User)
EXHAUST
(Normally Open)
Figure 3-1b shows the proper installation for
all CrystalSix applications.
A OUTPUT
PORT
P SUPPLY
(Normally Closed)
TO AIR
FITTING OF
FEEDTHROUGH
80-90 PSIG
AIR SUPPLY
TUBE FITTING
(Provided with Valve)
ORIFICE (059-189)
(Provided with Accessory Kit 750-268-G1)
90-95 PSIG for the
Sputtering Shutter
IPN 750-005