Figure 5-4 on, Figure 5-4 – INFICON Sputtering Sensor User Manual

Page 51

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5 - 5

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Sputtering Crystal Sensor Operating Manual

Figure 5-4 2 3/4" Dual Coax Feedthrough with Air Tube (002-080)

BNC CONNECTOR

2-3/4 CONFLAT FLANGE

CONNECTOR MICRODOT

SEAMLESS TUBE (3)

0.188 O.D., 0.131 I.D.

9.00

0.5

5.00

2.15

#10/32 INTERNAL THREAD

0.265 DIA. (6)

0.312 HEXAGONAL

0.90

0.45

2.75

0.40

0.20

0.45

0.40

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