INFICON Sputtering Sensor - Manual (Page 26)

2 - 4
IP
N 07
4-
15
7L
Sputtering Crystal Sensor Operating Manual
2.3 General Guidelines
Figure 2-1 shows the typical installation of an INFICON® water-cooled crystal
sensor in the vacuum process chamber. Use the illustration and the following
guidelines to install your sensors for optimum performance and convenience.
Figure 2-1 Typical Installation
Mounting Bracket
Coax Cable
(Routed with
Water Tubes)
Or,
Customer Supplied
Cajon Coupling
Brazing
Adapters
Water In
Water Out
XIU (Oscillator)
Instrument Chassis
Source
Source
Shutter
Pneumatic
Actuator
To
Source Controller
Source to Sensor
10" Minimum
Sensor
Shutter
Air, 80 PSIG, 110 PSIG Max.
To
Sensor
Shutter
IPN 750-420-G1
Shutter
Solenoid
Assembly
90-95 PSIG for Sputtering Shutter 750-005