INFICON Sputtering Sensor - Manual (Page 28)

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Sputtering Crystal Sensor Operating Manual
CAUTION
To prevent damage to the feedthrough or sensor during
brazing, insure that at least one inch of water tube is left
between the sensor and the feedthrough.
After cutting the water and air tubes, verify that they are clear of metal particles by
forcing compressed air through the tubing. Torch brazing is acceptable for
connecting the sensor to the feedthrough water tube.
Vacuum rated connectors, such as CAJON® are recommended for use between
the sensor and the feedthrough to speed maintenance. If brazing adapters are to
be used, attach them to the sensor water-cooling tubes prior to connection to the
feedthrough. Make connections as follows:
1 Clean the water tube and adapter surfaces with solvent if necessary.
2 Apply brazing flux to surfaces being joined.
3 Braze the connections using a flame temperature appropriate for the brazing
material being used.
CAUTION
Excessive application of brazing material, or excessive
heat due to brazing, may result in blockage of the water
tube.
4 Verify that each joint is not blocked by blowing compressed air through the
cooling tubes.
5 Thoroughly clean the braze joint and helium leak test before installing the
sensor and feedthrough into the process chamber.
2.4 Installing the Sputtering Sensor
NOTE: For best process reproducibility, rigidly support the sensor so that it cannot
move during maintenance and crystal replacement.
The sputtering sensor can be installed in any position, and supported by the
water-cooling tube. Cut the water-cooling tube to the proper length and connect it
to the feedthrough with brazing adapters or vacuum couplings. Avoid exposing the
sensor cable to the glow discharge by wrapping the cable around the water-cooling
tube and covering it with aluminum foil.
Figure 2-3 shows several possible
locations for the sensor in various sputtering systems.