INFICON Sputtering Sensor - Manual (Page 34)

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Sputtering Crystal Sensor Operating Manual
2.6.2 Installation
Before you begin the installation, refer to the illustrations to get an idea of how the
parts are assembled. The shutter assembly may be installed onto a new Sputtering
sensor or a used sensor in good condition.
1 Remove the actuator cover screw (4-40 x 3/16) on the shutter assembly and
remove the actuator cover. See
Figure 2-6 .
Figure 2-6 Top-View
2 Remove two water tube clamp screws (4-40 x 1/4) (not shown) and remove the
clamp. See
Figure 2-7 .
3 Remove the sensor body assembly from the sensor cover and set it in a clean
safe place. This is to protect the head during the installation. See
Figure 2-7 .
Figure 2-7 Side View
Sensor Cover Shutter
Actuator Cover
Actuator
Mounting
Screws
Actuator Cover Screw
Cable
Water Tube
Clamp
Sensor Body
Assembly
Sensor Cover