INFICON SID-142 Thin Film Deposition Controller - Manual (Page 15)

Chapter 2 Quick Start
2-6
Edit
Deposition Select the “Deposition” tab. This tab establishes the gain (P
Term), time constant (I Term), and dead time (D Term) for your
process. Set these values to 55, .7, and 0 respectively.
Be sure Shutter Delay Enabled is not selected. Select Ignore
for Control Error, and Continuous for Rate Sampling (see
picture below).