INFICON SID-142 Thin Film Deposition Controller - Manual (Page 21)

Chapter 2 Quick Start
2-12
Hint: It’s usually best to copy a layer, then paste several temporary layers of that
type. Next, assign the films that you want to each of the pasted layers. When
selecting films for codeposition, remember that each film in a codeposited layer must
be assigned to a different source output! Now use “Cut Layer” on the temporary
layers, and “Paste CoDep” to assign the film to the desired codeposition layers.
Review this example until you are comfortable with these concepts.
Edit Layer 1
Rate & Thickness Click Silver Sample in the list of layers. Set “Initial Rate” to 15
A/s, “Final Thickness” to 1.000 kA. Click the Rate Ramps tab
and adjust “Start Thickness” to 0.400 kA, “Ramp Time” to 15
seconds, and “New Rate” to 0 A/s.
Edit Layer 2
Rate & Thickness Click the Layer Tab, then click Layer 2. Set Final Thickness to
.5000 kA.
Set Layers to
Auto Start At the end of deposition, you may choose to have the next
layer wait for a Start Layer command, or to start automatically.
Select each Layer in the layers list, then click Auto to set that
layer to start automatically.
Verify that your process matches the one shown above.
Edit Silver
Deposition Select the “Deposition” tab and the Silver Sample layer. Set
each parameter to the values shown below.