INFICON SID-142 Thin Film Deposition Controller - Manual (Page 30)

Chapter 3 SQS-142 Software
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A number of “events” can trigger a data entry in the log file. “End Deposit Phase”
records process data (rate, thickness, time, etc.) at the end of each layer’s deposit
phase. Similarly, “End Each Phase” logs data at the end of each phase (conditioning,
depositing, etc.). “I/O Events” logs data each time an external digital input or output
changes. Finally, “Timed Logging” records data at the selected time intervals
throughout the process.
There are two formats for writing data. If “Spreadsheet” is selected, each entry is a
comma-delimited line of data. If “Text” is selected, the data is formatted for easy
reading. The first few lines of the file illustrate its format and content. Log files can be
viewed using a word processing or spreadsheet program.
Print Process: Prints the parameters for the current process to the system printer.
Select “Print to File” in the Printer Setup Menu to print the data to a file.
Print Setup: Selects and modifies the current system printer.
User Login: Displays the User Login screen so that a different user may login. The
existing user is logged off automatically. The program access level changes
immediately to that of the new user.
Exit: Exits the SQS-142 deposition control program.