INFICON SID-142 Thin Film Deposition Controller - Manual (Page 52)

Chapter 3 SQS-142 Software
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3.5 View Menu
The view menu controls the appearance of the main display.
Film Settings: Displays/hides a ribbon of process settings along the right of the screen.
In codeposition, click on the desired film to display its parameters. When displayed, the
settings ribbon allows the user to easily modify common process settings during
deposition without leaving the main screen. Changes are made to the current process
operation and the process database immediately. Additional process parameters are
available in the Edit menu.
Film Readings: Displays/hides film deposition readings along the bottom of the screen.
Readouts of Film, Rate, Deviation, Thickness, and Power are displayed simultaneously
for each of the active outputs. The rate, deviation, and thickness readings displayed
represent an average of the quartz sensors assigned to each film.
Sensor Readings: Displays/hides a pop up window of sensor rate, thickness,
remaining life, and frequency readings. Unlike the main screen’s Film Readings, this
display is the raw data coming from each sensor. In addition, the output (i.e. PID
control loop) that each sensor is assigned to is displayed. Sensor assignments are
established in the SQM-142 Setup menu.
Rate Graph: Fixes the main graph as deposition rate. Deposition rate is useful during
the shutter delay, rate ramp, and deposition phases. During other phases, the power
output graph is usually more useful.
Deviation Graph: Fixes the main graph as the percent deviation from the rate setpoint.
Rate deviation is useful for fine tuning the PID control loop.
Power Graph: Fixes the main graph at output power. Output power is controlled (rather
than PID control of rate) during the preconditioning, feed, and hold phases. Output
power is also useful during the deposition phases to detect error conditions, which
cause oscillations. Be sure the Full Scale voltage is set properly in the SQM-142 Setup
menu.
Automatic: Changes the main graph to display the most pertinent information for each
deposition phase. During preconditioning, output power is displayed. During shutter
delay, rate ramps, and deposition, the main graph displays deposition rate. During feed
and hold phases, the graph reverts to output power.