INFICON SID-142 Thin Film Deposition Controller - Manual (Page 34)

Chapter 3 SQS-142 Software
3-9
Rate Ramps Tab
Under PID control, rate ramps cause changes to the deposition rate over time. Each
rate ramp has a starting thickness, an elapsed time to ramp to a new rate, and a new
rate setpoint. Each process layer can have an unlimited number of rate ramps.
Insert Ramp: Inserts a new rate ramp for the selected layer, at the selected position.
Existing rate ramps are shifted down.
Delete Ramp: Deletes the selected rate ramp.
Move Up: Shifts the selected rate ramp up one position.
Move Down: Shifts the selected rate ramp down one position.
Start Thickness: The thickness that triggers a timed ramp to a new rate. (Start
thickness should be greater for each subsequent ramp, and less than the final layer
thickness, otherwise the rate ramp is skipped.)
Ramp Time: The time (in seconds) to ramp to the new rate. If the rate ramp is too fast,
a PID control error may be generated.
New Rate: The new rate setpoint for the selected layer.