INFICON SID-142 Thin Film Deposition Controller - Manual (Page 38)

Chapter 3 SQS-142 Software
3-13
Source/Sensor Tab
The Source/Sensor tab controls the physical setup of the deposition system.
Material: Selects the physical deposition material
Max Power: The maximum output power allowed for the selected output. The full scale
output voltage is a function of the deposition power supply input specifications, and is
set in the SQM-142 setup. Max Power controls the maximum power that can be used
by this process layer.
Slew Rate: The maximum power change allowed on an output, per second. If power or
rate ramps exceed this value, an error will occur.
Source Index: If using a source index, assigns each film to a specific pocket (one of 16
values), in addition to an output. These values are sent to the PLC at the beginning of
each layer. See the System Setup for other settings that pertain to the source index.
Output: Assigns the selected material to one of the source control outputs. When an
output is selected, the Sensor Tooling panel changes to show only those sensors that
are assigned to the output in the Edit, System dialog. The combination of a source
output and its sensor inputs defines the deposition “control loop” for the selected
material.